Analysis of Parameter Space of a Kilowatt-scale Free Electron Laser for Extreme Ultraviolet Lithography Driven by L-band Superconducting Linear Accelerator Operating in a Burst Mode
نویسندگان
چکیده
The driving engine of the Free Electron Laser in Hamburg (FLASH) is an L-band superconducting accelerator operating in a burst mode with 800 microsecond pulse duration at a repetition rate of 10 Hz. Our analysis shows that the FLASH technology holds great potential for increasing the average power of the linear accelerator and an increase of the conversion efficiency of the electron kinetic energy to the light. We show that it will be possible to construct a FLASH like free electron laser operating in 13.x nm and 6.x nm wavelength bands with an average power up to 3 kW. Such a source meets the requirements of the light source for the Next Generation Lithography (NGL).
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